Patent Assignment
Reel/Frame 021197/0422
Assignment of Assignor's Interest
Recorded: 2008-07-03
Pages: 4
Assignors
SANO, ATSUSHI
Executed: 2008-06-11
ITATANI, HIDEHARU
Executed: 2008-06-12
TANABE, MITSURO
Executed: 2008-06-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.