Patent Assignment
Reel/Frame 021209/0810
Assignment of Assignor's Interest
Recorded: 2008-07-09
Pages: 3
Assignors
KONDO, MASAKI
Executed: 2008-03-14
HAYASHI, TERUYUKI
Executed: 2008-03-14
SAITO, MISAKO
Executed: 2008-03-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Vacuum Processing Apparatus and Method