Patent Assignment
Reel/Frame 021220/0959
Assignment of Assignor's Interest
Recorded: 2008-07-07
Pages: 3
Assignors
INOUE, YUKI
Executed: 2007-12-07
FUKUNAGA, AKIRA
Executed: 2007-12-04
OGAWA, TAKAHIRO
Executed: 2007-12-04
Assignee
EBARA CORPORATION
11-1 ASAHI-CHO, HANEDA, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus, and Control Program