Patent Assignment
Reel/Frame 021249/0473
Assignment of Assignor's Interest
Recorded: 2008-07-16
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1. SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Manufacturing Method of a Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.