Patent Assignment
Reel/Frame 021276/0541
Assignment of Assignor's Interest
Recorded: 2008-07-15
Pages: 2
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS PROMENADE 10, 07745 JENA, GERMANY
Covered Property
(1)
Charged Particle Beam Exposure System and Beam Manipulating Arrangement
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.