Patent Assignment
Reel/Frame 021286/0812
Assignment of Assignor's Interest
Recorded: 2008-07-15
Pages: 6
Assignors
MIYA, HIRONOBU
Executed: 2008-06-06
HIRAHARA, KAZUHIRO
Executed: 2008-05-13
HAMADA, YOSHITAKA
Executed: 2008-05-13
SUDA, ATSUHIKO
Executed: 2008-06-06
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO 100-0004, JAPAN
Covered Property
(1)
Semiconductor Device Producing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.