Patent Assignment
Reel/Frame 021324/0591
Assignment of Assignor's Interest
Recorded: 2008-07-31
Pages: 3
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Device and Method for the Interferometric Measurement of Phase Masks
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.