Patent Assignment
Reel/Frame 021356/0344
Assignment of Assignor's Interest
Recorded: 2008-08-07
Pages: 4
Assignors
CHANG, SHOU-SUNG
Executed: 2008-08-04
CHEN, HUNG CHIH
Executed: 2008-08-01
TSAI, STAN D.
Executed: 2008-08-01
WANG, YUCHUN
Executed: 2008-08-01
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Closed Loop Control of Pad Profile Based on Metrology Feedback