Patent Assignment
Reel/Frame 021356/0633
Assignment of Assignor's Interest
Recorded: 2008-08-07
Pages: 2
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Cleaning a Patterning Device, Method of Depositing a Layer System on a Substrate, System for Cleaning a Patterning Device, and Coating System for Depositing a Layer System on a Substrate