Assignment of Assignor's Interest

Recorded: 2008-08-08 Pages: 4

Assignors

DODOC, AURELIAN

Executed: 2007-11-19

EHRMANN, ALBRECHT

Executed: 2007-11-22

BLEIDISTEL, SASCHA

Executed: 2007-11-19

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASS 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical System of a Microlithographic Projection Exposure Apparatus

Application: 12/188,652 →

Publication: US 2008/0309904

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.