Patent Assignment
Reel/Frame 021372/0140
Assignment of Assignor's Interest
Recorded: 2008-08-12
Pages: 3
Assignors
UCHIDA, HIROSHIGE
Executed: 2008-07-22
SHIRAISHI, DAISUKE
Executed: 2008-07-22
IKUHARA, SHOJI
Executed: 2008-07-23
KAGOSHIMA, AKIRA
Executed: 2008-07-22
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHINBASHI, MINATO-KU,, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Etching Endpoint Determination Method