Patent Assignment
Reel/Frame 021375/0494
Assignment of Assignor's Interest
Recorded: 2008-08-12
Pages: 2
Assignor
SCHUSTER, KARL-HEINZ
Executed: 2006-04-04
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlitographic Projection Exposure Apparatus and Immersion Liquid Therefore
Application:
12/190,007 →
Publication:
US 2008/0304032
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.