Patent Assignment
Reel/Frame 021377/0447
Assignment of Assignor's Interest
Recorded: 2008-08-13
Pages: 4
Assignors
ROHE, THOMAS
Executed: 2008-07-30
FISCHER, JUERGEN
Executed: 2008-07-22
BACH, FLORIAN
Executed: 2008-07-23
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Device for Controlling a Plurality of Actuators and an Illumination Device for Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.