Patent Assignment
Reel/Frame 021385/0263
Assignment of Assignor's Interest
Recorded: 2008-08-01
Pages: 3
Assignor
YAMAZAKI, SHUNPEI
Executed: 2008-07-25
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE ATSUGI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Plasma Cvd Apparatus, Method for Manufacturing Microcrystalline Semiconductor Layer, and Method for Manufacturing Thin Film Transistor