Patent Assignment
Reel/Frame 021388/0297
Assignment of Assignor's Interest
Recorded: 2008-08-07
Pages: 4
Assignors
MAEDA, TAKAHIRO
Executed: 2008-06-16
MAEDA, KIYOHIKO
Executed: 2008-06-16
OZAKI, TAKASHI
Executed: 2008-06-16
YOSHINO, AKIHITO
Executed: 2008-06-16
KOSHI, YASUNOBU
Executed: 2008-06-30
URANO, YUJI
Executed: 2008-06-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.