Patent Assignment
Reel/Frame 021395/0574
Assignment of Assignor's Interest
Recorded: 2008-08-15
Pages: 6
Assignors
WEBER, JOCHEN
Executed: 2008-07-28
MERZ, ERICH
Executed: 2008-08-04
FLUEGGE, OLE
Executed: 2008-07-28
BERROTH, KAI-UWE
Executed: 2008-07-18
BUEHLER, CORNELIA
Executed: 2008-07-29
HAUF, MARKUS
Executed: 2008-07-14
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Assembly, Projection Exposure Apparatus and Projection Objective
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.