Patent Assignment
Reel/Frame 021398/0452
Assignment of Assignor's Interest
Recorded: 2008-08-18
Pages: 5
Assignors
WOLTERS, CHRISTIAN H.
Executed: 2005-07-05
ROMANOVSKY, ANATOLY
Executed: 2005-07-05
SLOBODOV, ALEXANDER
Executed: 2005-07-05
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Systems, Circuits and Methods for Extending the Detection Range of an Inspection System by Avoiding Detector Saturation