Patent Assignment
Reel/Frame 021402/0242
Assignment of Assignor's Interest
Recorded: 2008-08-18
Pages: 3
Assignee
CARL ZEISS SMT INC.
ONE COPORATION WAY, PEABODY, MASSACHUSETTS, 01960
Covered Property
(1)
Multiple Current Charged Particle Methods
Application:
61/080,736 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.