Patent Assignment
Reel/Frame 021418/0460
Assignment of Assignor's Interest
Recorded: 2008-08-20
Pages: 5
Assignors
HARDIKAR, KEDAR
Executed: 2008-05-30
LIU, YAJIE
Executed: 2008-05-30
PANDIT, VIRAJ
Executed: 2008-05-30
Assignee
NOVELLUS SYTSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Edge Profiling for Process Chamber Shields
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.