Patent Assignment
Reel/Frame 021421/0532
Assignment of Assignor's Interest
Recorded: 2008-08-21
Pages: 5
Assignors
KNEER, BERNHARD
Executed: 2006-09-12
WABRA, NORBERT
Executed: 2006-09-06
GRUNER, TORALF
Executed: 2006-09-05
EPPLE, ALEXANDER
Executed: 2006-08-31
BEDER, SUSANNE
Executed: 2006-09-08
SINGER, WOLFGANG
Executed: 2006-09-05
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective for a Microlithographic Projection Exposure Apparatus
Application:
12/194,229 →
Publication:
US 2008/0304033
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.