Patent Assignment
Reel/Frame 021426/0545
Assignment of Assignor's Interest
Recorded: 2008-08-21
Pages: 4
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU TOKYO 100-8331, JAPAN
Covered Property
(1)
Movable Body Drive Method and Movable Body Drive System, Pattern Formation Method and Apparatus, Exposure Method and Apparatus, Device Manufacturing Method, and Measuring Method