Patent Assignment
Reel/Frame 021430/0282
Assignment of Assignor's Interest
Recorded: 2008-08-22
Pages: 5
Assignors
EHRMANN, ALBRECHT
Executed: 2006-11-07
WEGMANN, ULRICH
Executed: 2006-11-06
HOCH, RAINER
Executed: 2006-11-13
MALLMANN, JOERG
Executed: 2006-11-18
SCHUSTER, KARL-HEINZ
Executed: 2006-11-10
LOERING, ULRICH
Executed: 2006-11-14
GRUNER, TORALF
Executed: 2006-11-08
KNEER, BERNHARD
Executed: 2006-11-10
GEUPPERT, BERNHARD
Executed: 2006-11-06
SORG, FRANZ
Executed: 2006-11-10
KUGLER, JENS
Executed: 2006-11-13
WABRA, NORBERT
Executed: 2006-11-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus and Measuring Device for a Projection Lens
Application:
12/195,566 →
Publication:
US 2008/0309894
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.