Patent Assignment
Reel/Frame 021438/0687
Assignment of Assignor's Interest
Recorded: 2008-08-26
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZIESS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Optical System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.