Patent Assignment
Reel/Frame 021459/0738
Assignment of Assignor's Interest
Recorded: 2008-08-29
Pages: 5
Assignors
MARTIN, KEVIN P.
Executed: 1997-09-30
GILLIS, HARRY P.
Executed: 1997-10-07
CHOUTOV, DMITRI A.
Executed: 1997-10-21
Assignee
GEORGIA TECH RESEARCH CORPORATION
400 TENTH STREET, CENTENNIAL RESEARCH BUILDING, ATLANTA, GEORGIA, 30332-0415
Covered Property
(1)
Method and Apparatus for Low Energy Electron Enhanced Etching of Substrates in an Ac or Dc Plasma Environment