Patent Assignment
Reel/Frame 021468/0256
Change of Name
Recorded: 2008-09-02
Pages: 3
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.