Patent Assignment
Reel/Frame 021472/0064
Assignment of Assignor's Interest
Recorded: 2008-08-29
Pages: 2
Assignor
KATO, MASAKI
Executed: 2008-08-22
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Reflective, Refractive and Projecting Optical System; Reflective, Refractive and Projecting Device; Scanning Exposure Device; and Method of Manufacturing Micro Device