Patent Assignment
Reel/Frame 021472/0518
Assignment of Assignor's Interest
Recorded: 2008-09-03
Pages: 6
Assignors
GABRIC, ZVONIMIR
Executed: 2006-11-24
PAMLER, WERNER
Executed: 2006-11-24
SCHINDLER, GUENTHER
Executed: 2006-11-24
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STRASSE 53, MUNICH, 81669, GERMANY
Covered Property
(1)
Plasma Excited Chemical Vapor Deposition Method Silicon/Oxygen/Nitrogen-Containing-Material and Layered Assembly