Patent Assignment
Reel/Frame 021484/0631
Assignment of Assignor's Interest
Recorded: 2008-08-22
Pages: 3
Assignors
WONG, HARRY P.
Executed: 2008-08-21
WONG, VERNON
Executed: 2008-08-21
GRIFFIN, CHRISTOPHER CHARLES
Executed: 2008-08-21
TASKAR, MARK
Executed: 2008-08-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Alternate Gas Delivery and Evacuation System for Plasma Processing Apparatuses