Patent Assignment
Reel/Frame 021486/0684
Confirmatory License
Recorded: 2008-09-03
Pages: 2
Assignor
CALIFORNIA INSTITUTE OF TECHNOLOGY
Executed: 2008-07-24
Assignee
NASA
300 E STREET, SW, WASHINGTON, DISTRICT OF COLUMBIA, 20546
Covered Property
(1)
Multiple Internal Seal Ring Micro-Electro-Mechanical System Vacuum Packaging Method