Patent Assignment
Reel/Frame 021504/0889
Assignment of Assignor's Interest
Recorded: 2008-09-09
Pages: 14
Assignors
ADEL, MICHAEL
Executed: 2008-07-20
FIELDEN, JOHN
Executed: 2008-05-22
WIDMANN, AMIR
Executed: 2008-05-23
ROBINSON, JOHN
Executed: 2008-05-23
CHOI, DONGSUB
Executed: 2008-05-22
Assignee
KLA-TENCOR CORPORATION
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Feedforward/Feedback Litho Process Control of Stress and Overlay