Patent Assignment
Reel/Frame 021509/0166
Assignment of Assignor's Interest
Recorded: 2008-09-10
Pages: 5
Assignors
MANN, HANS-JUERGEN
Executed: 2008-08-18
KRAEHMER, DANIEL
Executed: 2008-08-25
DODOC, AURELIAN
Executed: 2008-08-28
GRUNER, TORALF
Executed: 2008-08-26
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Combination Stop for Catoptric Projection Arrangement
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.