Patent Assignment
Reel/Frame 021519/0800
Assignment of Assignor's Interest
Recorded: 2008-09-04
Pages: 4
Assignors
HORII, SADAYOSHI
Executed: 2008-09-02
IMAI, YOSHINORI
Executed: 2008-09-02
KARASAWA, MIKA
Executed: 2008-08-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.