Patent Assignment
Reel/Frame 021523/0664
Security Agreement
Recorded: 2008-09-12
Received: 2008-09-12
Pages: 19
Assignor
ATS SYSTEMS OREGON INC.
Executed: 2008-08-29
Assignee
BANK OF NOVA SCOTIA, AS AGENT, THE
44 KING STREET WEST, 16TH FLOOR, TORONTO, ONTARIO, CAX, M5H 1H1, CANADA
Covered Property
(1)
Method and Apparatus for Illuminating Projecting Features on the Surface of a Semiconductor Wafer
Application:
09/759,792 →