IP Library Patent Application 09759792
Patent Application Utility
App. No. 09/759,792 · Confirmation No. 2843

METHOD AND APPARATUS FOR ILLUMINATING PROJECTING FEATURES ON THE SURFACE OF A SEMICONDUCTOR WAFER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
Code Description Pages PDF
2001-09-21 TRNA Transmittal of New Application 2 View
2001-09-21 DRW Drawings-only black and white line drawings 22 View
2001-01-12 TRNA Transmittal of New Application 2 View
2001-01-12 SPEC Specification 32 View
2001-01-12 CLM Claims 8 View
2001-01-12 ABST Abstract 1 View
2001-01-12 DRW Drawings-only black and white line drawings 22 View
2001-01-12 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/759,792
Filed
2001-01-12
Granted
2003-04-15
Pub. No.
US20020093812A1
Art Unit
2875
PTA
-65 days