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App. No. 10/194,951 · Confirmation No. 2658

Method and apparatus for determining the location of an alignment mark on a wafer

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2005-04-19 ABN Abandonment 2 View
2004-08-17 CTNF Non-Final Rejection 7 View
2004-08-17 1449 List of References cited by applicant and considered by examiner 2 View
2004-08-17 892 List of references cited by examiner 1 View
2004-08-17 BIB Bibliographic Data Sheet 1 View
2004-08-17 FWCLM Index of Claims 1 View
2004-08-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-11 SRNT Examiner's search strategy and results 2 View
2003-02-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-02-20 LET. Miscellaneous Incoming Letter 1 View
2002-10-21 LET. Miscellaneous Incoming Letter 4 View
2002-10-21 OATH Oath or Declaration filed 3 View
2002-08-27 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-07-11 TRNA Transmittal of New Application 2 View
2002-07-11 SPEC Specification 31 View
2002-07-11 CLM Claims 7 View
2002-07-11 ABST Abstract 1 View
2002-07-11 DRW Drawings-only black and white line drawings 22 View
2002-07-11 OATH Oath or Declaration filed 6 View
2002-07-11 LET. Miscellaneous Incoming Letter 1 View
2002-07-11 WCLM Claims Worksheet (PTO-2022) 1 View
2002-07-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
App. No.
10/194,951
Filed
2002-07-11
Pub. No.
US20030025517A1
Art Unit
2875