Method and apparatus for use in wafer processing

Inventors: Cary S. Kiest, Villalobos Leda, Stephen J. Ralis, William F. Lenzke JR.

Provisional Application Expired

	Code	Description	Pages	PDF
2001-01-12	`TRNA`	Transmittal of New Application	2	View
2001-01-12	`SPEC`	Specification	29	View
2001-01-12	`DRW`	Drawings-only black and white line drawings	22	View
2001-01-12	`LET.`	Miscellaneous Incoming Letter	1	View

Inventors

Cary S. Kiest Albany, OR

Villalobos Leda Corvallis, OR

Stephen J. Ralis Corvallis, OR

William F. Lenzke JR. Salem, OR

Attorneys & Agents of Record

DAVID PETERSEN Reg. 28106 Attorney · KLARQUIST SPARKMAN LLP

Prosecution

No recorded assignments were found for this patent.

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