Patent Assignment
Reel/Frame 021532/0178
Assignment of Assignor's Interest
Recorded: 2008-09-15
Pages: 5
Assignors
EHM, DIRK HEINRICH
Executed: 2008-02-18
BIEG, HERMANN
Executed: 2008-02-05
MANN, HANS-JUERGEN
Executed: 2008-02-06
MUELLENDER, STEPHAN
Executed: 2008-02-11
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2008-02-26
WOLSCHRIJN, BASTIAAN THEODOOR
Executed: 2008-02-01
Assignees
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6507, VELDHOVEN, 5504DR, NETHERLANDS
Covered Property
(1)
Optical System for Radiation in the Euv-Wavelength Range and Method for Measuring a Contamination Status of Euv-Reflective Elements
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.