Patent Assignment
Reel/Frame 021534/0622
Assignment of Assignor's Interest
Recorded: 2008-09-16
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Apparatus for Microlithographyprojection System Including Polarization-Modulating Optical Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.