Patent Assignment
Reel/Frame 021539/0060
Assignment of Assignor's Interest
Recorded: 2008-09-11
Pages: 5
Assignors
GEH, BERND
Executed: 2008-05-23
LOOPSTRA, ERIK ROELOF
Executed: 2008-07-07
FLAGELLO, DONIS
Executed: 2008-05-30
Assignees
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
ASML NETHERLANDS B.V.
CORPORATE IP, 7D5005, DE RUN 6501, 5505 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Method of Controlling
Application:
12/061,339 →
Publication:
US 2008/0284998
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jul 25, 2008
From: GEH, BERND; LOOPSTRA, ERIK ROELOF; FLAGELLO, DONIS
To: CARL ZEISS SMS GMBH
Reel/Frame 021319/0355 →
Corrective Assignment to Correct the Assignee's Name and Address, Previously Recorded at Reel 021319 Frame 0355.
Sep 11, 2008
From: GEH, BERND; LOOPSTRA, ERIK ROELOF; FLAGELLO, DONIS
To: CARL ZEISS SMT AG; ASML NETHERLANDS B.V.
Reel/Frame 021521/0223 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →