Patent Assignment
Reel/Frame 021543/0195
Assignment of Assignor's Interest
Recorded: 2008-09-17
Pages: 10
Assignors
FEIGL, TORSTEN
Executed: 2008-08-26
BENOIT, NICOLAS
Executed: 2008-08-27
YULIN, SERGIY
Executed: 2008-08-26
KAISER, NOBERT
Executed: 2008-08-25
Assignee
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTR. 27C, MUENCHEN, 80686, GERMANY
Covered Property
(1)
Thermally Stable Multilayer Mirror for the Euv Spectral Range