Patent Assignment
Reel/Frame 021546/0337
Assignment of Assignor's Interest
Recorded: 2008-09-17
Pages: 6
Assignor
MULTIBEAM SYSTEMS, INC.
Executed: 2008-08-14
Assignees
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
MULTIBEAM SYSTEMS INC.
2090 DUANE AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Optics for Generation of High Current Density Patterned Charged Particle Beams
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.