Patent Assignment
Reel/Frame 024342/0790
Assignment of Assignor's Interest
Recorded: 2010-05-06
Pages: 6
Assignor
MULTIBEAM SYSTEMS, INC.
Executed: 2010-04-28
Assignee
MULTIBEAM CORPORATION
1900 WYATT DRIVE, SUITE 15, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(20)
Charged Particle Optics with Azimuthally-Varying Third-Order Aberrations for Generation of Shaped Beams
PCT:
PCT/US2008/057259 ↗
Variable-Ratio Double-Deflection Beam Blanker
PCT:
PCT/US2008/075637 ↗
Multi-Beam Multi-Column Electron Beam Inspection System
Platform Positioning System
Image Processing System for Multi-Beam Inspection
Detector Optics for Electron Beam Inspection System
Multi-Beam Multi-Column Electron Beam Inspection System
Flat Panel Display Substrate Testing System
Multi-Beam Multi-Column Electron Beam Inspection System
Patent:
6,844,550 →
Application:
10/630,619 →
Detector Optics for Charged Particle Beam Inspection System
Multi-Column Charged Particle Optics Assembly
Optics for Generation of High Current Density Patterned Charged Particle Beams
Dual Detector Optics for Simultaneous Collection of Secondary and Backscattered Electrons
Apparatus and Method for Inspection and Testing of Flat Panel Display Substrates
Detector Optics for Multiple Electron Beam Test System
Charged Particle Optics with Azimuthally-Varying Third-Order Aberrations for Generation of Shaped Beams
Variable-Ratio Double-Deflection Beam Blanker
Charged Particle Beam Deflection Method with Separate Stage Tracking and Stage Positional Error Signals
Electron Beam Lithography Apparatus and Design Method of Patterned Beam-Defining Aperture
Application:
12/209,882 →
Publication:
US 2009/0008579
Optics for Generation of High Current Density Patterned Charged Particle Beams
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 30, 2001
From: YIN, EDWARD M.; BRODIE, ALAN D.; PARKER, NORMAN WILLIAM; TSAI, FRANK CHING-FENG
To: ION DIAGNOSTICS, INC.
Reel/Frame 012367/0357 →
Assignment of Assignor's Interest
Oct 30, 2001
From: ION DIAGNOSTIC, INC.
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 012367/0328 →
Assignment of Assignor's Interest
May 21, 2002
From: ANDEEN, GERRY B.; LEE, MARTIN E.; PARKER, N. WILLIAM; MILLER, S. DANIEL
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 012927/0704 →
Assignment of Assignor's Interest
Jun 20, 2002
From: PARKER, N. WILLIAM; YIN, EDWARD N.; TSAI, FRANK CHING-FENG
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 013028/0956 →
Assignment of Assignor's Interest
Jul 18, 2002
From: MILLER, S. DANIEL; PARKER, N. WILLIAM; HOBMANN, STEVEN B.
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 013119/0095 →
Assignment of Assignor's Interest
Dec 13, 2002
From: PARKER, N. WILLIAM; MILLER, S. DANIEL
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 013582/0538 →
Assignment of Assignor's Interest
May 7, 2004
From: MOTOROLA, INC
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 015360/0718 →
Assignment of Assignor's Interest
Sep 7, 2004
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 015775/0408 →
Assignment of Assignor's Interest
Sep 9, 2004
From: PARKER, N. WILLLIAM; MILLER, S. DANIEL; GALANDE, VICTOR A.
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 015787/0279 →
Assignment of Assignor's Interest
Dec 7, 2004
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 016058/0817 →
Assignment of Assignor's Interest
Jun 9, 2005
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 016319/0312 →
Assignment of Assignor's Interest
Nov 16, 2005
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 017026/0965 →
Assignment of Assignor's Interest
Mar 27, 2006
From: PARKER, N. WILLIAM; MILLER, S. DANIEL
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 017385/0421 →
Security Agreement
Feb 2, 2007
From: FREESCALE SEMICONDUCTOR, INC.; FREESCALE ACQUISITION CORPORATION; FREESCALE ACQUISITION HOLDINGS CORP.; FREESCALE HOLDINGS (BERMUDA) III, LTD.
To: CITIBANK, N.A. AS COLLATERAL AGENT
Reel/Frame 018855/0129 →
Assignment of Assignor's Interest
Nov 9, 2007
From: PARKER, N. WILLIAM; MILLER, S. DANIEL; TIRUNEVELI, S. RAVI
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 020106/0602 →
Assignment of Assignor's Interest
Apr 17, 2008
From: PARKER, N. WILLIAM
To: MULTIBEAM
Reel/Frame 020830/0057 →
Assignment of Assignor's Interest
Jul 17, 2008
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 021256/0177 →
Assignment of Assignor's Interest
Aug 12, 2008
From: WIESNER, JOHN C.
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 021378/0820 →
Assignment of One-Half Interest
Aug 15, 2008
From: MULTIBEAM SYSTEMS, INC.
To: TOKYO ELECTRON LIMITED ('TEL")
Reel/Frame 021398/0135 →
Assignment of Assignor's Interest
Sep 22, 2008
From: TAKEYA, KOJI; FUSE, TAKASHI; KOTSUGI, TADASHI; PARKER, N. WILLIAM
To: TOKYO ELECTRON; MULTIBEAM SYSTEMS, INC.
Reel/Frame 021571/0967 →
Assignment of Assignor's Interest
Oct 7, 2008
From: TAKEYA, KOJI; FUSE, TAKASHI; KOTSUGI, TADASHI; PARKER, N. WILLIAM
To: TOKYO ELECTRON LIMITED; MULTRIBEAM SYSTEMS, INC.
Reel/Frame 021645/0834 →
Security Agreement
May 13, 2010
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 024397/0001 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0225 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0553 →
Patent Release
Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0143 →