Patent Assignment
Reel/Frame 021398/0135
Assignment of One-Half Interest
Recorded: 2008-08-15
Pages: 5
Assignor
MULTIBEAM SYSTEMS, INC.
Executed: 2008-08-14
Assignee
TOKYO ELECTRON LIMITED ('TEL")
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Properties
(5)
Multi-Beam Multi-Column Electron Beam Inspection System
Multi-Column Charged Particle Optics Assembly
Optics for Generation of High Current Density Patterned Charged Particle Beams
Charged Particle Optics with Azimuthally-Varying Third-Order Aberrations for Generation of Shaped Beams
Variable-Ratio Double-Deflection Beam Blanker
Related Assignments
(6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 13, 2002
From: PARKER, N. WILLIAM; MILLER, S. DANIEL
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 013582/0538 →
Assignment of Assignor's Interest
Sep 9, 2004
From: PARKER, N. WILLLIAM; MILLER, S. DANIEL; GALANDE, VICTOR A.
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 015787/0279 →
Assignment of Assignor's Interest
Dec 7, 2004
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 016058/0817 →
Assignment of Assignor's Interest
Apr 17, 2008
From: PARKER, N. WILLIAM
To: MULTIBEAM
Reel/Frame 020830/0057 →
Assignment of Assignor's Interest
Jul 17, 2008
From: PARKER, N. WILLIAM
To: MULTIBEAM SYSTEMS, INC.
Reel/Frame 021256/0177 →
Assignment of Assignor's Interest
May 6, 2010
From: MULTIBEAM SYSTEMS, INC.
To: MULTIBEAM CORPORATION
Reel/Frame 024342/0790 →