Patent Assignment
Reel/Frame 021560/0846
Assignment of Assignor's Interest
Recorded: 2008-09-22
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus, Exposure Apparatus Having the Same, and Device Manufacturing Method