Patent Assignment
Reel/Frame 021577/0297
Assignment of Assignor's Interest
Recorded: 2008-09-24
Pages: 8
Assignors
LATYPOV, AZAT M.
Executed: 2004-05-07
POULTNEY, SHERMAN K.
Executed: 2004-05-07
VLADIMIRSKY, YULI
Executed: 2004-05-07
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and System for Wavefront Measurements of an Optical System