Patent Assignment
Reel/Frame 021578/0160
Assignment of Assignor's Interest
Recorded: 2008-09-24
Pages: 4
Assignors
MIYAGI, TADASHI
Executed: 2008-09-02
KANAOKA, MASASHI
Executed: 2008-08-30
SHIGEMORI, KAZUHITO
Executed: 2008-08-22
YASUDA, SHUICHI
Executed: 2008-08-22
SANADA, MASAKAZU
Executed: 2008-08-22
Assignee
SOKUDO CO., LTD
K-I SHIJO BUILDING 88 KANKOBOKO-CHO, SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU, KYOTO, 600-8009, JAPAN
Covered Property
(1)
Substrate Processing Apparatus with Multi-Speed Drying Having Rinse Liquid Supplier That Moves from Center of Rotated Substrate to Its Periphery and Stops Temporarily So That a Drying Core Can Form
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.