Patent Assignment
Reel/Frame 021579/0406
Assignment of Assignor's Interest
Recorded: 2008-09-24
Pages: 2
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Dry Etching Method and Dry Etching Apparatus
Application:
12/180,118 →
Publication:
US 2009/0026172
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.