Patent Application
Utility
App. No. 12/180,118
· Confirmation No. 9411
DRY ETCHING METHOD AND DRY ETCHING APPARATUS
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-11-16 | ABN |
Abandonment | 2 | View | |
| 2012-04-10 | CTFR |
Final Rejection | 12 | View | |
| 2012-04-10 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-04-10 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2012-04-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-01-12 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-01-12 | CLM |
Claims | 5 | View | |
| 2012-01-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2012-01-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-01-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-10-13 | CTNF |
Non-Final Rejection | 12 | View | |
| 2011-10-13 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-10-13 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-10-13 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2011-10-13 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2011-10-13 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2011-08-19 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2011-08-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-07-22 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2009-01-29 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2008-11-04 | PD.FILED.E |
Priority Documents electronically retrieved by USPTO from a participating IP Office | 24 | View | |
| 2008-08-07 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-07-25 | TRNA |
Transmittal of New Application | 2 | View | |
| 2008-07-25 | OATH |
Oath or Declaration filed | 2 | View | |
| 2008-07-25 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2008-07-25 | SPEC |
Specification | 24 | View | |
| 2008-07-25 | CLM |
Claims | 5 | View | |
| 2008-07-25 | ABST |
Abstract | 1 | View | |
| 2008-07-25 | 136A |
Authorization for Extension of Time all replies | 2 | View | |
| 2008-07-25 | FRPR |
Certified Copy of Foreign Priority Application | 1 | View | |
| 2008-07-25 | PD.REQ.RETR |
Request for USPTO to retrieve priority docs | 2 | View | |
| 2008-07-25 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2008-07-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-07-25 | FOR |
Foreign Reference | 6 | View | |
| 2008-07-25 | FOR |
Foreign Reference | 9 | View | |
| 2008-07-25 | FOR |
Foreign Reference | 10 | View | |
| 2008-07-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-07-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-07-25 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Masaki KITABATA
Toyama, JAPAN
Shin-ichi Imai
Osaka, JAPAN
Attorneys & Agents of Record
Classification
USPC
216/67
H01J37/32972
H01J37/32935
Prosecution
- Examiner
- PHAM, THOMAS T
- Art Unit
- 1713
- Customer No.
- 53080
- Docket No.
- 050023-0267
- Confirmation No.
- 9411
Foreign Priority
2007-194214
·
2007-07-26
·
JAPAN
Publication
- Pub. No.
- US20090026172A1
- Pub. Date
- 2009-01-29
No related applications found.
CHANGE OF NAME
Recorded 2009-03-06
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-09-24
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Quick Facts
- App. No.
- 12/180,118
- Filed
- 2008-07-25
- Pub. No.
- US20090026172A1
- Examiner
- PHAM, THOMAS T
- Art Unit
- 1713
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