Patent Assignment
Reel/Frame 021581/0369
Assignment of Assignor's Interest
Recorded: 2008-09-24
Pages: 4
Assignors
DAVIS, MATTHEW F.
Executed: 2008-09-17
LILL, THORSTEN B.
Executed: 2008-09-17
LIAN, LEI
Executed: 2008-09-09
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Within-Sequence Metrology Based Process Tuning for Adaptive Self-Aligned Double Patterning