Patent Assignment
Reel/Frame 021593/0238
Assignment of Assignor's Interest
Recorded: 2008-09-26
Pages: 4
Assignors
TOMIOKA, KAZUHIRO
Executed: 2007-12-03
KOBAYASHI, NOBUYOSHI
Executed: 2007-12-03
SAKURAGI, ISAMU
Executed: 2007-12-03
KUBOTA, KAZUHIRO
Executed: 2007-12-03
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing System, and Computer-Readable Storage Medium